Fig. 6: Fabrication flow-charts.
From: Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices
Flow-charts of the a–m make-seal and n–w break-seal demonstrators. The processes are applied on 4-inch wafers, which are afterwards saw-diced into individual cells once the make-seal is actuated and the cells separated from the dispenser cavity. Step m: Cell wafer axonometric view enlightening the channel network structured in the cell lid. Note that fabrication of a cell with both seals is straightforward and solely requires switching the make-seal cell body with the break-seal one
