Fig. 3: High-sensitivity MDPS, on-chip amplified MDPS, and resonant MDPS.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Peninsula island-based bossed diaphragm structure48,49,53. b Planar construction view of the proposed structure48,49,53. c Stress difference from the central point to the diaphragm edge48,49,53. d Ultrahigh-sensitivity pressure sensor (top view),185. e Electrical circuit185. f Structural schematic of the improved capacitive resonant MDPS55. g Variation in the resonant frequency of the transducer with pressure55
