Fig. 6: RPS based on the electromagnetic method.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Resonator based on electromagnetic excitation and detection, where the first resonant mode is adopted as the working mode81,82. b Schematic of the differential pressure sensor with double “H”-type double-clamped resonant beams81,82. c Comparison of errors before and after differential compensation81,82. d Schematic of the developed micromachined resonant low-pressure sensor. e Intrinsic frequency shifts of the central (blue) and side (red) beams and differential outputs (green) as functions of low pressure at room temperature. f Front/back views of the microsensor chip, side view of the microsensor chip and layer-by-layer view of the core pressure-sensitive element with a stress isolation layer. g Differential RPS developed by Yokawaga84,85,86. h Cross-sectional view of the differential RPS chip
