Fig. 8: Equivalent circuit model of the resonant pressure sensor.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Equivalent circuit of the passive pressure sensor107. b Typical structure of the resonator and the amplitude-frequency analysis94. c Damping distribution in the resonant pressure resonator74. d Axisymmetric cross-section of capacitive pressure transducers and electromechanical coupling model108. e MEMS squeeze-film pressure sensor and the equivalent circuit model for readout and actuation109. f Model of a proposed thin-film piezoelectric-on-silicon MEMS resonant pressure sensor112
