Table 2 Performance comparisons of typically reported RPS studies
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
Author | Accuracy %FS | Sensitivity Hz/kPa | Q-factor | TCF ppm/°C | Detection method | Resonator number |
|---|---|---|---|---|---|---|
±0.02 | 29 | >10,000 | 44.4 | Capacitance | Not differential | |
±0.02 | 20 | >22,795 | 271 | Capacitance | Not differential | |
Welham88 | ±0.01 | 75 | >50,000 | / | Piezoresistive | Differential |
Yan89 | ±0.01 | 11.89 | >16,000 | 6.5 | Piezoresistive | Differential |
Han90 | ±0.02 | 19 | >25,000 | 7.3 | Piezoresistive | Not differential |
