Table 4 Research progress of typical pressure-related integrated sensors
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
Author | Pressure range | Temperature range | Pressure type | Pressure nonlinearity | Integrated sensor No. |
|---|---|---|---|---|---|
Zhao Y126 | 0–200 kPa | −30 °C–150 °C | Piezoresistive | ±0.4%FS | P + T + G |
Li X129 | 0–450 kPa | −40 °C–100 °C | Piezoresistive | ±0.84%FS | P + G |
Pramanik131 | 0–80 kPa | 25 °C–80 °C | Piezoresistive | / | P + T |
Clifton136 | 10–101 kPa | −30 °C–60 °C | Strain effect | / | 10 types of sensors |
Abdolreza132 | 0–2 MPa | 25 °C–175 °C | Capacitance | / | P + T |
