Fig. 1: Key modification of the dual catalysis-based ELP and conceptual design processes of the contrast experiments | Microsystems & Nanoengineering

Fig. 1: Key modification of the dual catalysis-based ELP and conceptual design processes of the contrast experiments

From: An ultra-deep TSV technique enabled by the dual catalysis-based electroless plating of combined barrier and seed layers

Fig. 1

a Schematic diagram of the effect of alkaline treatment on the surface of PI liner during alkaline catalysis. b Schematic diagram of the four cases for the ELP of Ni. Case A was the conventional ELP; Case B was the ultrasound-assisted ELP where ultrasound treatment was introduced to facilitate the Ni plating; Case C was the proposed dual catalysis-based ELP involving an additional catalysis procedure in an alkaline environment; and Case D was the ELP with only one catalysis procedure in an alkaline environment serving as a comparison

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