Fig. 2: Analytical and FEM simulation results together with the process flow.
From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
a Analytical modeling results of resonant frequency vs. rib-structure inner radius (4 μm to 340 μm) of PZT and AlN. b FEM results of resonant frequency vs. rib-structure inner radius. c The schematic diagram of the process flow of proposed microphones
