Fig. 4: Impedance and LDV test results.
From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
a An X-ray Diffraction (XRD) results of the single crystal PZT film. b Analytical model, FEM, and the measurement results of the resonant frequency change with the inner radius change. c LDV test results of the microphone with an inner radius of 340 μm. d–i Electric impedance measurement results of the different rib-structure microphones with various inner radius, and the resonant frequency varies from 76.4 kHz to 106.3 kHz while the inner radius is changed from 0 μm to 340 μm
