Fig. 1: Fabrication of the DLC-UME and principle of microplasma jet processing for UME tips. | Microsystems & Nanoengineering

Fig. 1: Fabrication of the DLC-UME and principle of microplasma jet processing for UME tips.

From: Controllable tip exposure of ultramicroelectrodes coated by diamond-like carbon via direct microplasma jet for enhanced stability and fidelity in single-cell recording

Fig. 1

a Fabrication of the DLC-UME: a-I Laser-assisted pulling of quartz capillary into nanopipette. a-II The nanopipette after pulling. a-III Sputter Cr layer. a-IV Sputter Au layer and leading enameled copper wire. a-V Sputter IrOx layer. a-VI Depositing DLC layer. a-VII Exposing the UME tip by microplasma jet. a-VIII Distribution of DLC-UME coatings. b Platform for microplasma jet processing of UMEs. c Principle of removing DLC coating at UME tip by microplasma jet

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