Fig. 7: Performance of the MEMS accelerometer.
From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
a Measured frequency response of the accelerometer. b Measured time ___domain output signals and filtered signals. c FFT spectrums of the output signals of the accelerometer without bias voltage. d The measured sensitivities and simulated sensitivities of the accelerometer under different bias voltages. e Noise floor of the accelerometer with Vb = 0 V and Vb = 25 V, respectively. f Allan deviation of the accelerometer with Vb = 0 V and Vb = 25 V, respectively. All the measurements are conducted under the open-loop test condition
