Table 4 Parameters of FEM models

From: The impact of sidewall copper grain condition on thermo-mechanical behaviors of TSVs during the annealing process

 

Grain size of Region 1 (μm)

Grain size of Region 2 (μm)

Grain size ratio between Region 1 and 2

Grain area ratio between Region 1 and 2

Model S1

3.00

3.00

1.00

3.00

Model S2

3.00

2.00

1.50

3.00

Model S3

3.00

1.50

2.00

3.00

Model S4

3.00

1.20

2.50

3.00

Model S5

3.00

1.00

3.00

3.00

Model S6

3.00

0.86

3.50

3.00

Model R1

3.00

1.50

2.00

2.00

Model R2

3.00

1.50

2.00

3.00

Model R3

3.00

1.50

2.00

4.00

Model R4

3.00

1.50

2.00

5.00

Model R5

3.00

1.50

2.00

infinite