Table 1 Performance comparison with state-of-the-art temperature-compensated thermal flow sensing systems

²¹

MEMS & PCB circuit

N/A

N/A

N/A

0–20; N/A^LR

±3.5%^Sen (−20 to 40 °C)

Software-based algorithm compensation

²⁶

MEMS & PCB circuit

N/A

N/A

36^b

0–6.37^a; N/A^LR

2.5%^Sen (20–34 °C)

Hardware-based circuitry compensation

²⁷

CMOS-MEMS & PCB circuit

<2.77^PH

543 mV/(m/s)

N/A

−11 to 11; −1.3 to 1.3^LR

0.5%^Sen (22–48 °C)

Hardware-based circuitry compensation

²⁰

MEMS & PCB circuit

<158.1^PH; <333.5^{PS, a}

N/A

N/A

0–33; N/A^LR

2.7%^Sys (0–40 °C)

Software-based algorithm compensation

This work

CMOS-MEMS monolithic

<0.92^PH; <4.96^PS

156 mV/(m/s)

87.5^b

−10 to 10; −6 to 6^LR

±1.6%^Sys (0–50 °C)

Hardware-based circuitry compensation