Fig. 2: Characterization of the fabricated pMUT. | Microsystems & Nanoengineering

Fig. 2: Characterization of the fabricated pMUT.

From: Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots

Fig. 2

a Top-view scanning electron microscopy (SEM) image of the fabricated pMUT array. b Cross-sectional SEM image of a pMUT element. c Magnified cross-sectional SEM image of the structural layer of a pMUT element. d X-ray diffraction (XRD) pattern of a Pb(Zr,Ti)O3 (PZT) film deposited on the bottom electrode. e Polarization–electric field curve of the deposited PZT film. f Frequency response of the pMUT membranes measured by scanning laser-Doppler vibrometer (SLDV) with a 2 Vpp sinusoidal signal at the first resonant frequency (9.22 MHz). Inset: Measured deflection profile of a single pMUT element and array with a 2 Vpp sinusoidal signal applied at the first resonant frequency

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