Table 1 Geometric parameters of pMUT array

From: Localized ultrasonic stimulation using a piezoelectric micromachined ultrasound transducer array for selective neural differentiation of magnetic cell-based robots

Center frequency (f0) in air

9.22 MHz

Total array size

1 mm × 7 mm

No. of channels

34

No. of elements per channel

42

Membrane diameter

60 μm

Element-to-element distance

10 μm

Channel-to-channel distance

10 μm

Pitch size

210 μm

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