Fig. 5: Performance comparison with recently μ-TED.

The structural parameter (a) and thermoelectric performance (b) comparison of recently reported μ-TED^{20,23,27,28,29,30,31,32,33,34,35,36,37,38,39}. c The airflow sensing performance of recently reported airflow sensors^{1,2,3,4,5,6,7,8,9,10,24,25,40,41,42}