Fig. 3: Pressure sensing performance of the ultrathin sensor. | Nature Communications

Fig. 3: Pressure sensing performance of the ultrathin sensor.

From: Localizing strain via micro-cage structure for stretchable pressure sensor arrays with ultralow spatial crosstalk

Fig. 3

a Schematic diagram of the experimental setup for pressure sensing. b Sensitivity curve of the sensor (top); Simulation of stress distribution of the prslPDMS layer and microstructured PDMS under external pressure (middle); Cross-sectional SEM images of the sensor under different pressures (bottom). Relative change in current (ΔI/I0) of the sensors with different interdigital Ag NFs electrodes (c), spacer layer thickness (d), and pyramid sizes (e). Relative change in current (ΔI/I0) of the sensor with different strains (f) and bending radii (g). Inset: sensor response after recovery from deformations (left) and to tiny forces even in the bending state (right). h Stability measurement of the pressure sensor, and the cycle period is over 5000 cycles. Inset: the response performance of the sensor with different spacer thickness.

Back to article page