Fig. 2: Characterizations of the fabricated diamond microparticles on Si substrate. | Nature Communications

Fig. 2: Characterizations of the fabricated diamond microparticles on Si substrate.

From: Multimodal dynamic and unclonable anti-counterfeiting using robust diamond microparticles on heterogeneous substrate

Fig. 2

a A photograph of the diamond PUFs fabricated on a 2-inch Si wafer. b Top-view scanning electron microscopy (SEM), c 45°-view SEM, and d cross-sectional SEM images of the fabricated diamond microparticles on the Si substrate. The particle size distribution of the diamond microparticles is shown in (b). e Raman, f X-ray diffraction (XRD), and g PL spectra of the fabricated diamond microparticles on the Si substrate. A representative atomistic diagram of a silicon-vacancy (SiV) center in a diamond unit cell is shown in (g). h Scanning transmission electron microscopy (STEM) image and corresponding electron energy loss spectroscopy (EELS) elemental maps from a diamond microparticle.

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