Fig. 1: ZnO as CMOS-BEOL-compatible transistor material. | Nature Communications

Fig. 1: ZnO as CMOS-BEOL-compatible transistor material.

From: CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor

Fig. 1

a Schematic illustrating the use of low-temperature processable ZnO semiconductor, allowing for BEOL integration of logic circuits and memory array. b Schematic illustrating the fabrication process flow of the ZnO TFT. c Photo image of the fabricated sample containing the ZnO TFTs, 1T1R memory array, inverter, and ring oscillator.

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