Fig. 4: Large-area integration of tBLG photodetectors.
From: Waveguide-integrated twisted bilayer graphene photodetectors
a Schematic illustration of the large-scale transfer of tBLG and fabrication of tBLG photodetectors. PDMS polydimethylsiloxane, PMMA polymethyl methacrylate. b Optical image of transferred tBLG on 4-inch SiO2/Si wafer. c Optical image of tBLG photodetectors (PDs) array. Scale bar: 1 mm. d Measured frequency response of 8 tBLG photodetectors in (c). 3-dB cutoff is marked by the red dash line. e Statistical histogram of photoresponsivity and 3-dB bandwidth from 8 devices in (c). The average bandwidth and responsivity are marked by the red and purple dash lines, respectively.
