Fig. 5: TEM, EDS, and TKD analyses of the micro-cantilever and matrix before and after pulsed ECT. | Nature Communications

Fig. 5: TEM, EDS, and TKD analyses of the micro-cantilever and matrix before and after pulsed ECT.

From: Micromachined structures decoupling Joule heating and electron wind force

Fig. 5

a–c STEM images of the microstructure (C/D) before ECT, and the micro-cantilever (C’) and matrix (D’) after ECT. d–f TKD analyses (γ phase shown in pink and σ phase in yellow) and elemental distributions of the local areas in (a–c). g Local STEM image at the area in (e), showing the precipitation of σ phase. h Content change of Cr in the α phase. i Content changes of Ni, Mn, and Cu in the γ phase. Statistical results are mean ± 95% CI.

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