Fig. 4: Demonstration of 2D interference patterns. | Nature Communications

Fig. 4: Demonstration of 2D interference patterns.

From: Direct nanopatterning of complex 3D surfaces and self-aligned superlattices via molecular-beam holographic lithography

Fig. 4

a Comparison of fabricated 3D surfaces made by SiO2 and Ge using identical nanoaperture design of square and hexagonal nanopore lattices (\(r=50\) nm and \(L/r=10.0\)). The average fitted values of surface diffusion length, \({R}_{{{{\rm{s}}}}}\), are 70 and 152 nm, respectively. b–d 2D interference patterns made by Ge using nanoapertures of square nanopore lattice in the condition of D = 2.5 μm and \(\varphi=5^\circ\). \(R\approx \left(D+\delta \right)\tan \varphi+{R}_{{{{\rm{s}}}}}=375\,{{{\rm{nm}}}}.\,\)Upon variation of \(r\) and \(L\), the experimentally measured (Exp.) AFM height (top row) and CL simulated probability (bottom row) profiles reveal three groups of 3D surfaces: (I) the complex lattice patterns (b), (II) the merged lattice patterns (c), and (III) the waffle patterns (d). The colors in each figure indicate the intensity of normalized height z from experimental AFM measurements or normalized probability from CL model. Scale bars: 1 µm.

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