Extended Data Fig. 3: Molecular dynamics simulation. | Nature

Extended Data Fig. 3: Molecular dynamics simulation.

From: Ultralow-dielectric-constant amorphous boron nitride

Extended Data Fig. 3

a, b, Side view (a) and top view (b) of a-BN grown on Si substrates at 673 K, calculated using molecular dynamics simulations. Different atomic species are shown in different colours: yellow (Si), blue (N) and pink (B). c, Mass density profile along the transverse direction (z), obtained from the results shown in a and b. Coloured solid lines denote the densities of different chemical species. The simulated density of a-BN is consistent with the experimental result. The black dashed line corresponds to the measured BN mass density.

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