Extended Data Fig. 4: FTIR, HR-RBS, HR-ERDA and NEXAFS analyses of a-BN films. | Nature

Extended Data Fig. 4: FTIR, HR-RBS, HR-ERDA and NEXAFS analyses of a-BN films.

From: Ultralow-dielectric-constant amorphous boron nitride

Extended Data Fig. 4

a, FTIR spectra of a-BN, showing the absence of B–H and N–H bonds. Abs, absorption. b, c, HR-RBS (b) and HR-ERDA (c) spectra of an a-BN film in the energy range 240–400 keV and 52–68 keV, respectively. d, Elemental composition calculated using the HR-RBS and HR-ERDA spectra. e, PEY-NEXAFS spectra for the N K edge of a-BN, measured at incident angles of 30°, 55° and 70°, demonstrating a small angular dependence of the N K edge.

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