Table 6 Statistical table of surface roughness before and after SPE for the wire-cut substrate samples.
Surface roughness before SPE/μm | Surface roughness after SPE/μm | Roughness relative variation |
---|---|---|
1.453 | 1.5825 | 8.9% |
1.39 | 1.46 | 5.04% |
1.448 | 1.4925 | 3.07% |
Average variation: 5.67% |