Abstract
The chemical structure, density, and deposition rate of hexamethyldisilazane plasma polymer were investigated in terms of reaction conditions, such as discharge power (W) and mass flow rate (Fm). The importance of the specific energy per mass (W/Fm) as the major controlling parameter of plasma polymerization was confirmed in this study. A notable infiuence of W/Fm on the chemical structure corresponded with the changes in density and deposition yield of plasma polymer. Deposition rate equation was proposed from the simplified model of plasma polymerization. Regression analysis of the experimental data supported the equation.
Similar content being viewed by others
Article PDF
References
H. Yasuda, “Plasma Polymerization,” Academic Press, New York, 1985.
J. R. Hollahan, “Techniques and Application of Plasma Chemistry,” Wiley-Interscience Publication, New York, 1974.
A. N. Mearns, Thin Solid Films, 3, 201 (1969).
S. Takeda, Jpn. J. Appl. Phys., 20, 1219 (1981).
Y. Segui, A. Bui, and H. Carchano, J. Appl. Phys., 47, 140 (1976).
D. Sanchez, M. Carchano, and A. Bui, J. Appl. Phys., 45, 1233 (1974).
K. Doblhofer and I. Eiselt, Thin Solid Films, 118, 181 (1984).
S. Morita, S. Hattori, M. Ieda, J. Tamano, and M. Yamada, Kobunshi Ronbunshu, 38, 657 (1981).
G. Akovali, J. Appl. Polym. Sci., 32, 4027 (1986).
N. J. Mazzeo, K. Y. Ahn, V. B. Jipson, and H. N. Lynt, Thin Solid Films, 108, 365 (1983).
P. K. Tien, G. Smolinsky, and R. J. Martin, Appl. Optics, 11, 637 (1972).
Y. Osada, A. Mizumoto, and H. Tsuruta, J. Macromol. Sci.-Chem., A24, 403 (1987).
P. V. Hinman, A. T. Bell, and M. Shen, J. Appl. Polym. Sci., 23, 3651 (1979).
T. Shimomura, M. Hirakawa, I. Murase, M. Sasaki, and T. Sano, J. Appl. Polym. Sci., Appl. Polym. Symp., 38, 173 (1984).
D. L. Cho and H. Yasuda, Proceedings of the ACS Division of Polymeric Materials, Vol. 57, 1987, p 599.
H. Yasuda and M. Gazicki, Biomaterials, 3, 68 (1982).
N. Inagaki, S. Kondo, M. Hirata, and H. Urushibata, J. Appl. Polym. Sci., 30, 3385 (1985).
P. D. Buzzard, D. S. Soong, and A. T. Bell, J. Appl. Polym. Sci., 27, 3965 (1982).
N. Nakajima, A. T. Bell, and M. Shen, J. Appl. Polym. Sci., 23, 2627 (1979).
H. Yasuda, J. Polym. Sci., Macromol. Rev., 16, 199 (1981).
H. Yasuda and T. Hirotsu, J. Polym. Sci.-Chem., 16, 743 (1978).
H.-U. Poll, M. Artz, and K.-H. Wickleder, Eur. Polym. J., 12, 505 (1976).
D. K. Lam, R. F. Baddour, and A. F. Stancell, J. Macromol. Sci.-Chem., A10, 421 (1976).
A. T. Bell, J. Macromol. Sci.-Chem., A10, 369 (1976).
L. F. Thompson and K. G. Mayhan, J. Appl. Polym. Sci., 16, 2317 (1972).
R. G. Greenler, J. Chem. Phys., 44, 310 (1966).
N. Inagaki, K. S. Chen, N. Kadonome, and K. Katsuura, Kobunshi Ronbunshu, 38, 665 (1981).
R. Szeto and D. W. Hess, J. Appl. Phys., 52, 903 (1981).
Y. Osada and M. Takase, J. Polym. Sci.-Chem., 23, 2425 (1985).
C. N. R. Rao, “Chemical Application of IR Spectroscopy,” Academic Press, New York, N. Y., 1963.
A. M. Wrobel, J. E. Klemberg, M. R. Wertheimer, and H. P. Schreiber, J. Macromol. Sci.-Chem., A15, 197 (1981).
E. D. Lipp, Appl. Spectroscopy, 40, 1009 (1986).
N. Inagaki and H. Hirai, J. Polym. Sci.-Chem., 24, 595 (1986).
A. M. Wrobel, J. Macromol. Sci.-Chem., A22, 1089 (1985).
J. Mort and F. Jansen, “Plasma Deposited Thin Films,” CRC Press, Boca Raton, FL, 1986.
M. Gazicki and H. Yasuda, J. Appl. Polym. Sci., Appl. Polym. Symp., 38, 35 (1984).
J. Kuester and J. Mize, “Optimization Techniques with Fortran,” John Wiley & Sons, New York, N. Y., 1973, pp 251-256.
S. Y. Park, Ph.D thesis, Seoul National Univ., 1988.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Park, S., Kim, N., Kim, U. et al. Plasma Polymerization of Hexamethyldisilazane. Polym J 22, 242–249 (1990). https://doi.org/10.1295/polymj.22.242
Issue Date:
DOI: https://doi.org/10.1295/polymj.22.242
Keywords
This article is cited by
-
Chemical route for synthesis of β-SiAlON:Eu2+ phosphors combining polymer-derived ceramics route with non-hydrolytic sol-gel chemistry
Journal of Sol-Gel Science and Technology (2022)
-
Simultaneous, efficient and continuous oil–water separation via antagonistically functionalized membranes prepared by atmospheric-pressure cold plasma
Scientific Reports (2021)
-
Hydrogenated Silicon Carbonitride Thin Film Nanostructuring Using SF6 Plasma: Structural and Optical Analysis
Silicon (2020)
-
Initial Growth of Functional Plasma Polymer Nanofilms
Plasma Chemistry and Plasma Processing (2016)
-
Inducing hydrophobic surface on polyurethane synthetic leather by atmospheric pressure plasma
Fibers and Polymers (2014)
