Fig. 3: Design and SEM images of the MPPC.
From: Metasurface higher-order poincaré sphere polarization detection clock
a Side view and top view of the meta-atom, which composed of an elliptical TiO2 nanoblock on the SiO2 substrate. b Calculated PCR as a function of nanoblock’s in-plane dimensions at the working wavelength of 633 nm. c Simulated phase shifts as a function of nanoblock’s in-plane dimensions under x-linearly polarized incident light. The black dots in (b) and (c) denote the selected four fundamental nanoblocks, which simultaneously owns a phase gradient of π/4 and a relatively high PCR. d The phase profile components of the MPPC. The phase profiles of the RCP and LCP components are a sum of an angular lens, a spiral phase plate and a lens, respectively. e Overall SEM image of the meta-device. Scale bar: 30μm. f, g Top view and side view SEM images of part of the sample that marked with the green frame in (e). Scale bar: 1μm
