Fig. 1: Model of bending and off-axis deformation and the strain testing system for flexible SAW devices. | Microsystems & Nanoengineering

Fig. 1: Model of bending and off-axis deformation and the strain testing system for flexible SAW devices.

From: Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications

Fig. 1

a Schematic diagrams of flexible and layered SAW devices at different off-axis angles α and bending strains (which is proportional to the bending angle θ); b schematic view of the strain testing system used for flexible SAWs at various off-axis angles α; c fabricated flexible SAW device on an ultrathin flexible glass substrate, showing its good flexibility and wafer-scale level; and d microscopic images of fabricated flexible SAW devices, showing the whole device and well-defined IDTs with a periodicity of 20 µm.

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