Fig. 20: Silicon nanowire sensor and miniaturized graphene pressure sensor.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Photograph of the NW pressure sensor163. b Schematic of the test setup, showing 5-µm long NWs (red) embedded next to the anchor of the SiO2 cantilever165. c SEM image of released cantilever with embedded NWs165. d Schematic of the graphene pressure sensor common design. e Percentage change in resistance of graphene membrane area for three devices with different membrane areas166
