Fig. 4: Quartz RPSs.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Stress simulation of differential output tuning fork tines65. b Main fabrication process of the DETF quartz resonator65. c Photograph of the tuning fork prototype65. d Packaged pressure sensor prototype with a tuning fork and stainless-steel package68,69. e Photograph of the EPSON quartz pressure sensor69. f Overall structural diagram of a flexible hinge lever70. g Main structural diagram of the sensor70. h Photograph of the sensor before packaging70
