Fig. 9: Closed-loop control circuit techniques for RPS.
From: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
a Schematic of the closed-loop circuit with automatic gain control100. b Schematic view of the oscillator and the frequency response of the loop gain101. c Digital control system for frequency signals98. d Block diagram of the adaptive control technique95. e CMOS phase-locked loop-driving circuit59. f Measurement system of the piezoresistive pressure sensor103. g Closed-loop configuration with the PID technique104
