Fig. 1: Schematic of the rib-structured microphone.
From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
a High SPL application for microphones such as aircraft engine. b Diagram of the proposed microphone. c Optical and SEM images of the six different rib-structure designs. d SEM image of the membrane multilayers, showing a 1.1 μm PZT layer with an orientation of (100). e The model of the single crystal PZT and polycrystal PZT after poling. f The differential output based on the reverse polarization of single crystal PZT
