Fig. 5: Schematic of the amplifiers design.
From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
a Typical model of the piezoelectric microphone and an example of the capacitance extraction model. b, c Two-stage differential charge amplifier and the single-ended charge amplifier. d, e Frequency response simulation results from the differential and single-ended charge amplifiers
