Fig. 6: Acoustic test results of the microphone. | Microsystems & Nanoengineering

Fig. 6: Acoustic test results of the microphone.

From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film

Fig. 6

a Designed acoustic test system for rib-structure microphones and differential output microphone. b Sensitivities of microphones with different rib structures and differential outputs at 94 dB SPL and 1 kHz. c Sensitivity variation of single-ended and differential microphones in the audio bands. d Comparison of the A-weighted noise amplitude spectral density for single and differential microphones

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