Table 1 Material properties of piezoelectric films6
From: Piezoelectric MEMS microphones based on rib structures and single crystal PZT thin film
Material | ρ (g/cm3) | E (GPa) | d31 (pC/N) | ε33,r |
|---|---|---|---|---|
Poly-PZT | 7.7 | 96 | −130 | 1300 |
Single Crytal -PZT | — | — | −110 | 200 |
AlN | 3.26 | 330 | −2.65 | 9.5 |
Sc9.5%AlN | 3.52 | 250 | — | 10.5 |
