Fig. 1: The proposed anti-spring mechanism.
From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity
a Schematic of the proposed anti-spring mechanism with dimension definitions. b Schematic of the proposed anti-spring mechanism after deflection. c Schematic of a clamped-clamped pre-shaped curved beam in the initial position and after deflection under a lateral force F applied to its middle. d Typical axis force and stiffness curves for the proposed anti-spring mechanism. High sensitivity can be achieved by biasing the curved beams at the critical state of buckling using electrostatic force
