Fig. 4: Schematic of a miniaturized capacitive accelerometer with the proposed anti-spring mechanism and its characteristic curves. | Microsystems & Nanoengineering

Fig. 4: Schematic of a miniaturized capacitive accelerometer with the proposed anti-spring mechanism and its characteristic curves.

From: A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity

Fig. 4

a A miniaturized accelerometer using the proposed anti-spring mechanism as a suspension structure. b Comparison between force–deflection curves for the accelerometer and the proposed anti-spring mechanism. The anti-spring mechanism curves are obtained from theoretical modeling and FEM simulation, while the accelerometer curves are obtained from FEM simulation

Back to article page