Table 3 Comparisons with different fabricated sensors

From: Near-zero nonlinear error pressure sensor based on piezoresistor sensitivity matching for wind tunnel pressure test

Sensor

Full-scale output (mV)

Size (x×y) mm2

Sensitivity (mV/kPa)

Nonlinearity (%FS)

Ref. 15

70.40

2.5 × 2.5

0.49

0.012

Ref. 13

144.00

2.1 × 2.1

1.60

0.040

Ref. 18

48.80

0.6 × 0.6

1.21

0.010

Ref. 20

88.00

/

0.70

0.060

Kulite

68.75

0.7 × 0.7

0.54

0.100

This work

168.10

1.5 × 1.5

1.68

0.004