Fig. 2: The working mode and analysis results of the differential resonant accelerometer.
From: A zinc oxide resonant nano-accelerometer with ultra-high sensitivity
a The working mode of the differential resonant accelerometer. Resonant frequency and frequency shift of (b) ZnO nano-resonator with different sizes, (c) accelerometer without microleverage under different external accelerations, (d) accelerometer with microleverages under different external accelerations, (e) accelerometers with microleverages under different external accelerations in electronic field. f Resonant frequency and frequency shift of differential resonant accelerometer under different external accelerations in y-direction and z-direction.
