Table 2 The RIE process recipes.

From: Fabrication of superconducting niobium nitride nanowire with high aspect ratio for X-ray photon detection

Recipe

Etching Gas

Discharge Power

Gas Flow

Chamber Pressure

1

CF4

50 W

30sccm

1.2 Pa

2

CF4

80 W

30sccm

1.2 Pa

3

CF4

100 W

30sccm

1.2 Pa

4

CF4

80 W

30sccm

2 Pa

5

CF4

80 W

30sccm

4 Pa

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