Table 1 Parameters of the DSS
From: Synchronous detection of dual signals based on constant-drive technique of weakly coupled resonators
Parameters | Value |
|---|---|
Nominal frequency | 22.9 kHz |
Beams of resonators length | 1200 μm |
Beams of resonators width | 12 μm |
Coupler inner radius | 305 μm |
Coupler external radius | 313 μm |
Gap between drive comb | 2.5 μm |
Drive comb overlap length | 11 μm |
Gap between sense capacitor | 2.5 μm |
Sense capacitor length | 110 μm |
Gap between volt tune capacitor | 2.5 μm |
