Fig. 1: Deposition and TEM characterization of Al2O3/Al NLs.
From: Al2O3/Al hybrid nanolaminates with superior toughness, strength and ductility
a Principle of deposition method via DC magnetron sputtering; b bright-field TEM image of 50/10 NL specimen. The inset shows a high-resolution TEM image of the Al/Al2O3/Al interface together with Fast Fourier Transforms (FFTs) from the yellow squares. The coloured EELS map shows layers of aluminum (yellow) alternating with amorphous alumina (oxygen in blue). The Al2O3 layers are fully amorphous. Note also the good coherency of the Al/Al2O3 interfaces with limited undulations.
